RTP-RTN System

Description: AST Cheetah RTP / RTA System provides the complete product line covering the production scale from volume production, pilot production to RD platform. Cheetah RTP / RTA System has served Industry Application of worldwide customers from LED, LD, Solar Cell, Power Semiconductor, Compound Semiconductor, MEMS, Advanced Packaging, and Touch Panel. 1) Implant Annealing / Activation 2) Alloy 3) PSG/BPSG Reflow 4) Eutectic Reflow 5) Trench Oxidation 6) Gate Dielectric Formation 7) Poly –Si Annealing 8) Ti Silicide / Nitride Features: Cheetah series has system configuration for manual, semi, and fully auto system, suitable for different customer application.Specification: Standard Model for Manual, Semi-Auto, Fully-Auto, Single and Dual Chamber with Dual Robot Arm Available. Please contact AST for your application. Safety Approval: TUV Country of Original: Taiwan Main Export Markets: Worldwide